Functional water, method and apparatus of producing the same, and method and apparatus of rinsing electronic parts therewith
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United States of America Patent
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Jul 11, 2006
Grant Date -
Oct 9, 2003
app pub date -
Apr 1, 2003
filing date -
Apr 2, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A functional water containing a fluorine-containing component obtained by electrolyzing an aqueous solution containing fluoride ion using electrodes having conductive diamonds, a method of producing the same, and a method and an apparatus of rinsing electronic parts using the functional water as a rinsing water. The fluorine-containing component produced by electrolyzing the fluoride ion using the conductive diamond, has stronger rinsing effect than that of a fluorine-containing component obtained by electrolyzing the fluoride ion itself before electrolysis or the fluoride ion using other electrodes. Therefore, an amount of hydrofluoric acid used can greatly be decreased.
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