Probe card having a coil spring interposed between a support member and a contactor unit
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United States of America Patent
Stats
-
Jul 11, 2006
Grant Date -
Jun 3, 2004
app pub date -
Jul 21, 2003
filing date -
Aug 9, 2002
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A probe card including a substrate body, a contactor unit provided below the substrate body for establishing an electrical contact with the subject to be tested as well as for establishing an electrical contact with the substrate body, a supporting device for supporting the contactor unit from below with elastic force and parallelism adjusting screws that come in contact with the contactor unit from above in a vertical direction for adjusting a degree of parallelism of the contactor unit. In particular, the supporting device is configured to include a coil spring interposed toward a vertical direction between a flange section provided at the inside section of the support member arranged below the substrate body and a flange section provided at the outside section of the contactor unit.
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