Differential pressure measurement using backside sensing and a single ASIC
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United States of America Patent
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Jul 18, 2006
Grant Date -
Jan 5, 2006
app pub date -
Aug 23, 2004
filing date -
Jul 2, 2004
priority date (Note) -
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Abstract
Differential pressure sensor systems and methods are disclosed, including an absolute pressure sensor composed of a plurality of pressure sense die for detecting sensed media, wherein each of the pressure sense die possess a back side and a front side and are respectively associated with a plurality of varying pressures. The sensed media are applied only at the backside of the pressure sense die, thereby preventing wire bonds and active regions associated with the front side of the pressure sense die from exposure to sensed media and attack from acids and abrasive chemicals associated with the sensed media.
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