Importance

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Abstract

A micro-electromechanical liquid ejection device includes a wafer substrate that incorporates drive circuitry and that defines a liquid inlet. A nozzle chamber structure is positioned on the wafer substrate and defines a nozzle chamber in fluid communication with the liquid inlet and a liquid ejection port in fluid communication with the nozzle chamber. An actuator is connected to the drive circuitry to be reciprocally displaceable with respect to the substrate on receipt of an electrical signal from the drive circuitry. A liquid displacement member is positioned in the nozzle chamber and is displaceable to eject liquid from the liquid ejection port. A sealing structure interconnects the liquid displacement member and the actuator. The sealing structure and the nozzle chamber structure are configured so that the liquid generates fluidic seals between the nozzle chamber structure and the sealing structure to inhibit the egress of liquid from the nozzle chamber during operation.

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First Claim