Micro-electromechanical liquid ejection device with a thermal actuator that undergoes rectilinear motion
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United States of America Patent
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Jul 18, 2006
Issued Date -
N/A
app pub date -
Dec 12, 2005
filing date -
Jul 15, 1997
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A micro-electromechanical liquid ejecting device includes a substrate that defines a liquid inlet channel. A drive circuitry layer is positioned on the substrate. A nozzle chamber structure is positioned on the substrate. The nozzle chamber structure has sidewalls and a roof that define a nozzle chamber in liquid communication with the inlet channel. The roof wall defines a liquid ejection port in liquid communication with the nozzle chamber. A pivot member is positioned in one of the sidewalls and is pivotal with respect to the roof. A liquid ejecting member is fast internally with the pivot member and extends into the nozzle chamber such that displacement of the pivot member results in movement of the liquid ejecting member relative to the roof, thereby ejecting liquid from the liquid ejection port. A rectilinear actuator is connected to the drive circuitry, is configured for rectilinear movement on receipt of a drive signal and is connected to the pivot member to displace the pivot member and thus the liquid ejecting member.
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