Sorting/storage device for wafers and method for handling thereof
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United States of America Patent
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Jul 18, 2006
Grant Date -
N/A
app pub date -
Sep 21, 1999
filing date -
Oct 14, 1998
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Sorting/storage device for wafers. A sorting device is provided in which at least two cassettes containing wafers may be present and the wafers are moved from one cassette to the other cassette or vice versa. If appropriate, a measuring station may be present in the sorting device. In the immediate vicinity of the sorting device, the cassettes are stored in a magazine which is designed for this purpose and the cassettes are moved using a handling device for cassettes.
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