Micro-machining employing multiple independently focused and independently steered beams
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United States of America Patent
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Jul 18, 2006
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app pub date -
Dec 23, 2003
filing date -
Sep 12, 2003
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Abstract
A system for delivering energy to a substrate includes a laser energy source providing at least two laser beams, wherein each of the beams is steered to an independently selectable location on a target, and is independently focused onto the target.
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