Calibration and error correction in multi-channel imaging

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United States of America Patent

PATENT NO 7079251
APP PUB NO 20050083531A1
SERIAL NO

10687308

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Abstract

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A multi-channel imaging system is calibrated by measuring the geometric distortion in each sub-image, generating corresponding correction factors, and applying such factors to correct subsequent image data. In addition, intensity transfer-function arrays are measured at each pixel, and further used to correct for system and detector nonlinearities and nonuniformity between images. The procedure is repeated over a range of wavelengths to produce a complete set of correction coefficients and transfer functions. When the system is used for interferometric phase measurements, multiple measurements are preferably taken and a random phase offset in the reference path length is introduced at each measurement. The multiple phase data so derived are then averaged to reduce phase-dependent systematic measurement errors.

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Patent OwnerAddress
ONTO INNOVATION INC16 JONSPIN ROAD WILMINGTON MA 01887

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brock, Neal J Tucson, AZ 7 306
Denneau, Jr Larry Tucson, AZ 2 20
Millerd, James E Aliso Viejo, CA 14 434

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