Method of observation by transmission electron microscopy
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United States of America Patent
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Aug 1, 2006
Grant Date -
Feb 24, 2005
app pub date -
Sep 21, 2004
filing date -
Sep 20, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method for observing defects in an amorphous material by transmission electron microscopy. The method generates an incident electron beam into the amorphous material, eliminates a generated diffraction wave to form an image only by a transmission wave coming through the amorphous material, and observes the image under an under-focus condition.
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