Circuit pattern inspection instrument and pattern inspection method
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United States of America Patent
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Aug 8, 2006
Grant Date -
Mar 16, 2006
app pub date -
Nov 28, 2003
filing date -
Nov 30, 2002
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Disclosed is a circuit pattern inspection apparatus for inspecting a conductive pattern of a circuit board which includes first and second comb-shaped conductive patterns (15a, 15b) each having a plurality of terminal portions arranged substantially parallel to each other and a base portion connecting respective anchor ends of the terminal portions together, wherein the terminal portions of the first comb-shaped conductive pattern are alternately arranged with respect to the terminal portions of said second comb-shaped conductive pattern, and the first second comb-shaped conductive patterns (15a, 15b) are adapted, respectively, to be supplied with an AC inspection signal, and grounded. The circuit pattern inspection apparatus having first and second detection means (20, 30) each having a detection electrode for detecting a signal from the first and second comb-shaped conductive patterns, and a scalar robot (80) operable to move each of the first and second detection means (20, 30) across common ones of the terminal portions, while allowing them be capacitively coupled with the terminal portions.
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