Semiconductor manufacturing fault detection and management system and method

United States of America Patent

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Aug 8, 2006
Grant Date
Dec 15, 2005
app pub date
May 26, 2004
filing date
May 26, 2004

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Abstract

The present disclosure provides a semiconductor manufacturing fault detection and management system and method for monitoring at least one manufacturing entity to detect state changes.

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TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

International Classification(s)

G06F:ELECTRIC DIGITAL DATA PROCESSING

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Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Chia, Tong Lung	Jhubei, TW	1	15

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Semiconductor manufacturing fault detection and management system and method

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United States of America Patent

10853790

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PATENT NO	7089072
APP PUB NO	20050278053A1
SERIAL NO	10853790
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
August 08, 2006	US,7089072,B2 US7089072B2	GRANTED PATENT AS SECOND PUBLICATION
December 15, 2005	US,20050278053,A1 US20050278053A1	FIRST PUBLISHED PATENT APPLICATION

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10853790

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