Inspection system for active matrix panel, inspection method for active matrix panel and manufacturing method for active matrix OLED panel
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United States of America Patent
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Aug 15, 2006
Grant Date -
Apr 28, 2005
app pub date -
Jul 29, 2004
filing date -
Oct 29, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An inspection system for inspecting characteristics of an active matrix panel before formation of OLEDs includes: a roller contact probe having a conductive material on at least a surface thereof and sequentially contacting pixel electrodes formed on the active matrix panel while rotating; probe control circuits having capability to apply a voltage necessary for measurement to TFT arrays including pixel electrodes with which the roller contact probe is in contact; and a computer measuring currents flowing through the TFT arrays to which a voltage is applied and statistically processing the measurement results.
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