Illumination system with spatially controllable partial coherence compensating for line width variances
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United States of America Patent
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Aug 15, 2006
Issued Date -
N/A
app pub date -
Oct 12, 2004
filing date -
Nov 25, 1996
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An illumination system having an array optical element with different illumination regions corresponding or matched to different line width variations printed on a photosensitive material. The array optical element may be a filter, diffractive optical element, or micro lens array having illumination regions producing different types of illumination properties or characteristics. Each of the illumination regions are matched or correspond to a respective region on a patterning device to provide optimized exposure of a photosensitive material. The optical element may be used to tailor a conventional illumination system to the unique characteristics of the projection optics used in a system, thereby compensating for vertical and horizontal bias or variations in line width for features oriented in the vertical and horizontal direction.
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