Architecture of a reflective spatial light modulator
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United States of America Patent
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Aug 15, 2006
Grant Date -
Jul 29, 2004
app pub date -
Jan 13, 2004
filing date -
Jun 19, 2002
priority date (Note) -
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Abstract
A micro-mirror array fabricated on one substrate is bonded to a second substrate that includes addressing electrodes and control circuitry. In one embodiment, the micro mirror array is fabricated from a substrate that is a single crystal material. There is enough area beneath the micro mirror array for electrodes and control circuitry, including memory buffers and a pulse width modulation array to be fabricated on the second substrate.
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