US Patent No: 7,092,231
Number of patents in Portfolio can not be more than 2000
Chuck, lithographic apparatus and device manufacturing method
Stats
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Aug 15, 2006
Issued date -
Aug 19, 2003
filing date -
10/643,167
serial no -
In Force
status
Importance
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Abstract
A lithographic projection apparatus is provided with an electrostatic chuck. The electrostatic chuck includes a dielectric element which has a plurality of pins formed on a first surface. The item to be clamped is clamped in position on the chuck by applying a potential difference between an electrode located on the surface of the dielectric member opposite to the clamping surface and an electrode located on the clamping surface of the item to be clamped. The pins are provided with at least an upper conducting layer, which serves to reduce the Johnsen-Rahbek effect, allowing the substrate to be released more quickly.
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First Claim
Related Publications
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International Classification(s)
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Cited Art
| Patent Info | (Count) | # Cites | Year |
|---|---|---|---|
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| 5,350,479 Electrostatic chuck for high power plasma processing | 123 | 1992 | |
| 5,885,469 Topographical structure of an electrostatic chuck and method of fabricating same | 13 | 1996 | |
| 5,841,624 Cover layer for a substrate support chuck and method of fabricating same | 17 | 1997 | |
| 5,880,924 Electrostatic chuck capable of rapidly dechucking a substrate | 56 | 1997 | |
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| 4,384,918 Method and apparatus for dry etching and electrostatic chucking device used therein | 160 | 1981 | |
| 5,777,838 Electrostatic chuck and method of attracting wafer | 35 | 1996 | |
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| 5,923,408 Substrate holding system and exposure apparatus using the same | 58 | 1997 | |
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| 6,754,062 Hybrid ceramic electrostatic clamp | 5 | 2002 | |
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| 6,314,735 Control of exhaust temperature in lean burn engines | 17 | 2000 | |
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| 5,160,152 Electrostatic chuck | 49 | 1991 | |
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| 4,551,192 Electrostatic or vacuum pinchuck formed with microcircuit lithography | 68 | 1983 | |
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| 6,452,775 Electrostatic chuck and method for manufacturing the same | 14 | 2000 | |
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| 4,502,094 Electrostatic chuck | 103 | 1982 | |
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| 6,388,861 Electrostatic wafer clamp | 17 | 1995 | |
Patent Citation Ranking
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Feb 15, 2014 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Feb 15, 2018 |
| Fee | Large entity fee | small entity fee | micro entity fee |
|---|---|---|---|
| Surcharge - 7.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
| Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |