Apparatus and method for utilizing a meniscus in substrate processing
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United States of America Patent
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Aug 22, 2006
Issued Date -
N/A
app pub date -
Sep 30, 2004
filing date -
Sep 30, 2002
priority date (Note) -
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Abstract
An apparatus for processing a substrate is provided which includes a proximity head proximate to a surface of the substrate when in operation. The apparatus also includes an opening on a surface of the proximity head to a cavity defined in the proximity head where the cavity delivers an active agent to the surface of the substrate through the opening. The apparatus further includes a plurality of conduits on the surface of the proximity head that generates a fluid meniscus on the surface of the substrate surrounding the opening.
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