Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays
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United States of America Patent
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Aug 22, 2006
Grant Date -
Oct 28, 2004
app pub date -
Apr 20, 2004
filing date -
Apr 24, 2003
priority date (Note) -
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Abstract
The invention provides a micro-electro-mechanical-system (MEMS) mirror device, comprising: a mirror having a 2-dimensional rotational articulated hinge at a first end, and having a 1-dimensional rotational articulated hinge at a second end opposite the first end; a movable cantilever connected to the mirror through the 1-dimensional rotational articulated hinge; a support structure connected to the mirror through the 2-dimensional rotational articulated hinge and connected to the movable cantilever; whereby movement of said movable cantilever causes rotation of the mirror in a first axis of rotation, and the mirror is also rotatable about a second torsional axis of rotation perpendicular to said first axis of rotation.
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