Semiconductor wafer carrier mapping sensor
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United States of America Patent
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Aug 22, 2006
Grant Date -
Jul 31, 2003
app pub date -
Dec 16, 2002
filing date -
Dec 17, 2001
priority date (Note) -
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status (Latency Note)
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Abstract
An improved laser-based wafer carrier mapping sensor is provided. The sensor includes a number of improvements including laser source improvements; optical improvements; and detector improvements. Laser source improvements include the type of laser sources used as well as the specification of size and power of such sources. Optical improvements include features that intentionally defocus the laser stripe on the wafer as well as additional features that help ensure precision stripe generation. Detector improvements include increasing gain while decreasing the effects of ambient light. Various combinations of these features provide additional synergies that facilitate the construction of a sensor with significantly improved dynamic response while decreasing the frequency of false cross slot errors.
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