Acoustically coupled thin-film resonators having an electrode with a tapered edge
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United States of America Patent
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Aug 29, 2006
Grant Date -
May 4, 2006
app pub date -
Nov 3, 2004
filing date -
Nov 3, 2004
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Abstract
Acoustically coupled resonators include a first and a second acoustic resonator. Both the first and second acoustic resonators include a first electrode, a layer of piezoelectric material, and a second electrode. The first electrode is adjacent a first surface of the layer of piezoelectric material. The second electrode is adjacent a second surface of the layer of piezoelectric material. At least the second electrode has an edge that is tapered.
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