Surface acoustic wave sensing system and method for measuring pressure and temperature
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United States of America Patent
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Sep 5, 2006
Issued Date -
N/A
app pub date -
Aug 26, 2004
filing date -
Aug 29, 2003
priority date (Note) -
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Abstract
A surface acoustic wave (SAW) sensor and an interrogator that transmits a noise source to the sensor for receiving an interrogation signal that is processed and compared to the source signal provides pressure and temperature measurements. One SAW sensor a single interdigital transducer serving as both an input and an output transducer for generating and detecting a SAW, and coded reflectors in a mirrored arrangement opposing the single interdigital transducer. The piezoelectric substrate is supported in a hermetically sealed package such that pressure on the package causes distortion of the substrate transducer surface and thus SAW velocity changes that reflect changes in pressure. Characteristic temperature coefficients of delay for the substrate are directly translated into a temperature value.
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