Adaptive manufacturing for film bulk acoustic wave resonators
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United States of America Patent
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Sep 5, 2006
Grant Date -
Jan 22, 2004
app pub date -
Jul 22, 2002
filing date -
Jul 22, 2002
priority date (Note) -
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status (Latency Note)
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Abstract
An adaptive manufacturing process for a Film Bulk Acoustic Resonator (FBAR) tests the FBAR circuit during manufacturing to determine a resonant frequency thereof. Reactive tuning elements may be adjusted as needed depending on the testing to change the resonant frequency to a desired resonant frequency. In an exemplary embodiment, predetermined masks may be applied to modify the tuning elements.
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