MEMS device and methods for manufacturing thereof, light modulation device, GLV device and methods for manufacturing thereof, and laser display
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United States of America Patent
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Sep 5, 2006
Grant Date -
Aug 5, 2004
app pub date -
Feb 17, 2003
filing date -
Feb 19, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention provides a MEMS device and methods for manufacturing thereof, in which planarizing the surface of a beam and improving performance of the MEMS device are aimed. In addition, the present invention provides a light modulation device and a GLV device in which this MEMS device is used, and methods for manufacturing thereof; and further, a laser display using this GLV device. According to the present invention, a MEMS device includes a substrate side electrode and a beam that is disposed so as to oppose the substrate side electrode and is driven by electrostatic attraction force or electrostatic repulsion force that acts between the substrate side electrode and the driving side electrode, with the substrate side electrode being formed of a single-crystalline semiconductor layer.
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