Importance

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Abstract

An end effector alternately (or simultaneously) transports susceptors and wafers. Separate contact surfaces are provided for wafer transport and for susceptor transport. In one embodiment, the wafer contact surface is spaced above the susceptor contact surface, and the susceptor is a plate with a recess sized and deep enough to accommodate the wafer contact surface without touching it, while being supported upon the susceptor contact surface. The wafer contact surface is a complete or C-shaped ring having an annular opening connected to a vacuum pump. In another embodiment, the wafer contact surface is spaced below the susceptor contact surface, and both comprise peripheral edge support surfaces. The edge support surfaces can be formed from a single sloped surface for each contact pad, with a smaller wafer supported below the position of a larger susceptor plate. Alternatively, a stepped surface is provided for each pad, with the lower inner contact surfaces supporting a wafer and the upper outer contact surfaces supporting the susceptor.

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First Claim