Probe card and contactor of the same
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Sep 12, 2006
Issued Date -
N/A
app pub date -
Sep 29, 2005
filing date -
Aug 27, 2003
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The probe card to be used for the measurement of the electrical characteristics of a semiconductor device such as an LSI chip and comprising the contactor mounting substrate on which a plurality of contactors are provided, in which the contactor comprises an insertion part for mounting the contactor on the contactor mounting substrate, a support part for supporting the insertion part and performing positioning in the height direction by contacting a surface of the, contactor mounting substrate, an arm part extending from the support part, and a contact part arranged at a tip end of the arm part to come in contact with an electrode of an object to be tested, and the insertion part is detachably mounted on an electrode hole provided in the surface of the contactor mounting substrate and made to be conductive by a wiring pattern. In some embodiments, a contactor includes a holding part and/or pressurized part integrated with the supporting part.
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