Method and apparatus for inspecting reticles implementing parallel processing
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United States of America Patent
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Sep 12, 2006
Grant Date -
N/A
app pub date -
Nov 24, 1999
filing date -
May 5, 1999
priority date (Note) -
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Abstract
Disclosed is an apparatus for analyzing a plurality of image portions of at least a region of a sample. The apparatus includes a plurality of processors arranged to receive and analyze at least one of the image portions, and the processors being arranged to operate in parallel. The apparatus also includes a data distribution system arranged to receive image data, select at least a first processor for receiving a first image from the image data, select at least a second processor for receiving a second image from the image data, and output the first and second image portions to their selected processors.
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