Thin-film bulk acoustic oscillator and method of manufacturing same
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Sep 19, 2006
Grant Date -
Jan 13, 2005
app pub date -
Apr 1, 2004
filing date -
Jul 9, 2003
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A thin-film bulk acoustic oscillator comprises: a base; a barrier layer disposed on the base; a lower electrode disposed on the barrier layer; a piezoelectric thin film disposed on the lower electrode; and an upper electrode disposed on the piezoelectric thin film. The piezoelectric thin film includes a columnar crystal that extends in the direction intersecting the film surface. The top surface of the piezoelectric thin film is flattened by polishing so as to have a root mean square roughness of 2 nm or smaller.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully