Interferometer calibration methods and apparatus
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United States of America Patent
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Sep 19, 2006
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app pub date -
Jul 21, 2004
filing date -
Jul 21, 2004
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Abstract
A method for calibrating an interferometer uses an actuator adapted to control an optical gap in response to application of an electrical signal. The interferometer is illuminated with a beam of light having a predetermined substantially monochromatic wavelength, oriented at a first predetermined angle of incidence, and light reflected from the interferometer at a second predetermined angle is detected while varying an electrical signal applied to the actuator, thereby establishing a calibrated relationship between the applied electrical signal and an optical path length of the interferometer.
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