Low thermal expansion ceramic and member for exposure system
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United States of America Patent
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Sep 26, 2006
Grant Date -
May 29, 2003
app pub date -
Sep 20, 2001
filing date -
Sep 20, 2000
priority date (Note) -
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Abstract
A low-thermal-expansion, rigid and wear-resistant ceramic is provided. The low-thermal-expansion ceramic of the invention includes 60 vol % to 99.9 vol % of at least one selected from the group consisting of cordierite, spodumene and eucryptite and 0.1 vol % to 40 vol % of at least one selected from the group consisting of carbides, nitrides, borides and silicides of group IVa elements, group Va elements and group VIa elements, and boron carbide. The ceramic has a porosity of 0.5% or less and a thermal expansion coefficient, at 10.degree. C. to 40.degree. C., of 1.5.times.10.sup.-6/.degree. C. or less.
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