Process yield learning
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United States of America Patent
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Sep 26, 2006
Grant Date -
May 5, 2005
app pub date -
Oct 29, 2003
filing date -
Oct 29, 2003
priority date (Note) -
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Abstract
A method for producing yield enhancement data from integrated circuits on a substrate. A database of defects on the substrate is compared to a database of design information for the integrated circuits. The defects on the substrate are associated with classes of design information to produce the yield enhancement data.
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