High angular deflection micro-mirror system
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United States of America Patent
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Oct 3, 2006
Grant Date -
Jan 19, 2006
app pub date -
Jul 15, 2004
filing date -
Jul 15, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A high angular deflection micro-mirror system including a substrate, a spacer structure extending from the substrate, a deformable membrane supported by the spacer structure, one or more supports located off center on the deformable membrane, and one or more mirrors on the support cantilevered therefrom to achieve a high angular deflection of the mirrors as the deformable membranes deform.
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