Plate-based microelectromechanical switch having a three-fold relative arrangement of contact structures and support arms
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United States of America Patent
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Oct 10, 2006
Grant Date -
Mar 9, 2006
app pub date -
Aug 19, 2004
filing date -
Aug 19, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A microelectromechanical system (MEMS) switch is provided which includes a multiple of three support arms extending from the periphery of a moveable electrode. In addition, MEMS switch includes a plurality of contact structures having portions extending into a space between a fixed electrode and the moveable electrode. In some cases, the relative arrangement of the support arms and the contact structures are congruent among three regions of the MEMS switch which collectively comprise the entirety of the fixed electrode and the entirety of the moveable electrode. In other embodiments, the contact structures may not be arranged congruently within the MEMS switch.
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