Micromirror device and method for making the same

United States of America Patent

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Oct 10, 2006
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Feb 11, 2005
filing date
Aug 25, 2004

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Abstract

Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.

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Patent Owner(s)

Patent Owner	Address
TEXAS INSTRUMENTS INCORPORATED	12500 TI BLVD MS 3999 DALLAS TX 75243

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G02B:OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS

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[Patents Count]

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Inventor Name	Address	# of filed Patents	Total Citations
Doan, Jonathan	Mountain View, CA	17	243
Dunphy, James	San Jose, CA	47	508
Huibers, Andrew	Palo Alto, CA	69	2174
Patel, Satyadev	Palo Alto, CA	43	670
Shi, Hongqin	San Jose, CA	33	475
Simonian, Dmitri	Sunnyvale, CA	29	428
Zhang, Jianglong	Sunnyvale, CA	16	223

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Micromirror device and method for making the same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

11056727

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Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
October 10, 2006	US,7119944,B2 US7119944B2	GRANTED PATENT AS SECOND PUBLICATION
March 16, 2006	US,20060056005,A1 US20060056005A1	FIRST PUBLISHED PATENT APPLICATION

PATENT NO	7119944
SERIAL NO	11056727
DOCKET NO

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11056727

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