Altering temporal response of microelectromechanical elements
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United States of America Patent
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Oct 10, 2006
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N/A
app pub date -
Mar 3, 2004
filing date -
Mar 3, 2004
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Abstract
An array of movable elements is arranged on a substrate. Each element has a cavity and a movable member to move through the cavity. The pressure resistance of the elements varies, allowing actuation signals to be manipulated to activate elements with different pressure resistance at different levels of the actuation signal.
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