Using electric discharge machining to manufacture probes
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United States of America Patent
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Oct 17, 2006
Grant Date -
May 27, 2004
app pub date -
Nov 25, 2002
filing date -
Nov 25, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method of forming a probe array includes forming a layer of tip material over a block of probe material. A first electron discharge machine (EDM) electrode is positioned over the layer of tip material, the EDM electrode having a plurality of openings corresponding to a plurality of probes to be formed. Excess material from the layer of tip material and the block of probe material is removed to form the plurality of probes. A substrate having a plurality of through holes corresponding to the plurality of probes is positioned so that the probes penetrate the plurality of through holes. The substrate is bonded to the plurality of probes. Excess probe material is removed so as to planarize the substrate.
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