Method for making an infrared detector and infrared detector
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United States of America Patent
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Oct 17, 2006
Grant Date -
Jun 17, 2004
app pub date -
Sep 9, 2003
filing date -
Sep 9, 2002
priority date (Note) -
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Abstract
A detector including a base having a recess formed therein and a diaphragm generally extending across the recess. The detector further includes an infrared sensitive component or a piezoelectric or piezoresistive element located on, above or supported by the diaphragm. The diaphragm includes a material which is generally resistant to liquid chemical etchants and which has a thermal conductivity of less than about 0.005 Wcm.sup.-1K.sup.-1.
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