Method and apparatus for the monitoring and control of a semiconductor manufacturing process
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Oct 17, 2006
Issued Date -
N/A
app pub date -
Mar 23, 2005
filing date -
Sep 30, 2002
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An Advanced Process Control (APC) system including Graphical User Interfaces (GUIs) is presented for monitoring and controlling a semiconductor manufacturing process that is performed by a semiconductor processing system. The semiconductor processing system includes a number of processing tools, a number of processing modules (chambers), and a number of sensors, and the APC system comprises an APC server, database, interface server, client workstation, and GUI component. The GUI is web-based and is viewable by a user using a web browser.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully