Pressure sensor with non-planar membrane
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United States of America Patent
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Oct 24, 2006
Grant Date -
May 4, 2006
app pub date -
Oct 18, 2004
filing date -
Oct 18, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A pressure sensor for sensing a fluid pressure in harsh environments such as the air pressure in a tire, by using a chamber partially defined by a flexible membrane (20), the chamber containing a fluid at a reference pressure, such that the flexible membrane (20) deflects due to pressure differentials between the reference pressure and the fluid pressure; and, associated circuitry for converting the deflection of the flexible membrane (20) into an output signal indicative of the fluid pressure; wherein, the membrane (20) is non-planar (22, 24). It is possible to extend the linear range of the pressure-deflection response with a non-planar membrane (20). Corrugations, a series of raised annuli (22) or other surface features are an added complexity in the fabrication process but can extend the linear range of the sensor by 1 MPa.
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