Device and method of positionally accurate implantation of individual particles in a substrate surface
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United States of America Patent
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Oct 24, 2006
Grant Date -
Apr 14, 2005
app pub date -
Oct 9, 2003
filing date -
Oct 9, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A device and a method for positionally accurate implantation of individual particles in a substrate surface (1a) are described. A diaphragm for a particle beam to be directed onto the substrate surface (1a) and a detector provided thereon in the form of a p-n junction for determining a secondary electron flow produced upon impact of a particle onto the substrate surface (1a) are provided on a tip (4) which is formed on a free end portion of a flexible arm (2) to be mounted on one side. The device is part of a scanning device operating according to the AFM method.
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