Method of irradiating ultraviolet light onto an object

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United States of America Patent

PATENT NO 7126745
SERIAL NO

11313686

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Abstract

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A method of irradiating ultraviolet light onto an object. The method includes generating pulse light having a single wavelength within a range from 1.51 .mu.m to 1.59 .mu.m from a laser generating portion, amplifying the pulse light plural times with an optical amplifier that includes a plurality of fiber optical amplifiers, wavelength-converting the amplified pulse light into ultraviolet light with a wavelength converting portion that includes a plurality of non-linear optical crystals, and irradiating the ultraviolet light onto the object through an optical system.

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Patent Owner(s)

Patent OwnerAddress
NIKON CORPORATION15-3 KONAN 2-CHOME MINATO-KU TOKYO 1086290 ?1086290

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ohtsuki, Tomoko Macungie, PA 17 718
Owa, Soichi Tokyo, JP 110 2777

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