Thin-film crystal-structure-processed mechanical devices, and methods and systems for making
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United States of America Patent
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Oct 31, 2006
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Apr 23, 2002
filing date -
Apr 23, 2002
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Abstract
Thin-film laser-effected internal crystalline structure modified materials suitable for the creation of various small-dimension mechanical devices, either singly or in monolithic arrays, such as MEMS devices. Processing is carried out at room temperature and atmospheric pressure.
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