NF3 production reactor
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United States of America Patent
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Oct 31, 2006
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app pub date -
Dec 12, 2003
filing date -
Dec 23, 2002
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Abstract
A process for the production of nitrogen trifluoride by reacting fluorine gas and liquid ammonia acid fluoride in a first reaction zone having a relatively low energy input followed by treatment of the resulting reaction product in a second reaction zone having a relatively high energy input. The resulting crude nitrogen trifluoride product may be further treated with fluorine gas under elevated temperatures to improve yield of the desired product.
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