Dense arrays and charge storage devices

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United States of America Patent

PATENT NO 7129538
SERIAL NO

10842008

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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There is provided a monolithic three dimensional array of charge storage devices which includes a plurality of device levels, wherein at least one surface between two successive device levels is planarized by chemical mechanical polishing.

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Patent Owner(s)

Patent OwnerAddress
WODEN TECHNOLOGIES INC251 LITTLE FALLS DRIVE WILMINGTON DE 19808

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cleeves, James M Redwood City, CA 132 7898
Farmwald, Paul M Portola Valley, CA 9 998
Herner, Brad Palo Alto, CA 16 1513
Johnson, Mark G Los Altos, CA 64 7721
Kouznetzov, Igor G Santa Clara, CA 8 1294
Lee, Thomas H Cupertino, CA 90 7474
Petti, Christopher Mountain View, CA 38 2204
Subramanian, Vivek Redwood City, CA 102 7010
Walker, Andrew J Mountain View, CA 106 5890

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