Defect inspecting apparatus
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United States of America Patent
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Oct 31, 2006
Issued Date -
N/A
app pub date -
Oct 26, 2005
filing date -
Oct 27, 2004
priority date (Note) -
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Abstract
A defect inspecting apparatus in which a plurality of probes to measure electric characteristics of a sample including a fine wiring pattern are combined with a charged-particle beam unit includes graphic user interfaces (GUI) to simply control the plural probes. The apparatus includes a probe image processing unit to display the plural probes on a display; a selecting unit to select, from the probes displayed on the display, a probe to be operated; and a display unit to simultaneously display the probe selecting unit and information indicating that the selected probe is an operable probe, or the probe is in a non-selected state.
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