Film of yttria-alumina complex oxide, a method of producing the same, a sprayed film, a corrosion resistant member, and a member effective for reducing particle generation
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United States of America Patent
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Nov 21, 2006
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N/A
app pub date -
Aug 4, 2003
filing date -
Jul 19, 2001
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Abstract
The invention provides a film of an yttria-alumina complex oxide having a high peel strength with respect to a substrate. A mixed powder of powdery materials of yttria and alumina is sprayed on a substrate to form a sprayed film made of an yttria-alumina complex oxide. Preferably, the powdery material of yttria has a 50 percent mean particle diameter of not smaller than 0.1 .mu.m and not larger than 100 .mu.m, and the powdery material of alumina has a 50 percent mean particle diameter of not smaller than 0.1 .mu.m and not larger than 100 .mu.m. Preferably, the yttria-alumina complex oxide contains at least a garnet phase, and may further contain a perovskite phase.
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