Device and method for inspection
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Nov 21, 2006
Grant Date -
Nov 7, 2002
app pub date -
Jun 13, 2001
filing date -
Jun 16, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The present invention provides an inspection apparatus and an inspection method, capable of, when supplying an inspection signal to a circuit wiring, eliminating any need for a pin to be brought into contact with the circuit wiring and detecting any defects including an invisible microscopic defect. An inspection apparatus A for inspecting a circuit wiring of a circuit board 100 comprises a conductive member 1 adapted to be disposed on the side of one of surfaces of the circuit board 100 and to be supplied with an inspection signal, a signal source 2 for supplying the inspection signal to the conductive member 1, a sensor unit 3 including a plurality of cells 3a to be disposed the opposed to the conductive member 1 on the side of the other surface of the circuit board 100, and a computer 5 for acquiring each signal appearing at the cells 3a in response to the inspection signal supplied to the conductive member 1.
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