Dynamically adaptable semiconductor parametric testing
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United States of America Patent
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Nov 21, 2006
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app pub date -
Aug 24, 2004
filing date -
Apr 25, 2002
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Abstract
An apparatus, method, system, and signal-bearing medium may provide multiple maps, which may include multiple probing sequences to be called upon at run-time based on statistical thresholds or other selected criteria. Each map may include a series of locations on a wafer, the tests to perform at each location, and the measured results of each test. A parametric test system may perform the test at the associated location on the wafer. If the statistical threshold is exceeded or the selected criteria is met, the current map may be abandoned in favor of a different map.
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