Process for manufacturing a capacitive vacuum measuring cell
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United States of America Patent
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Nov 28, 2006
Issued Date -
N/A
app pub date -
Jul 11, 2003
filing date -
Dec 23, 1997
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A capacitive vacuum measuring cell includes first and second ceramic housing bodies (1, 4) joined by an edge seal (3). A thin ceramic membrane (2) is supported between first and second housing bodies (1, 4) by the edge seal (3) at a small distance from the first housing body (1) creating a reference vacuum chamber (25) therebetween. An electrically conductive material (7) coats opposing surfaces of the first housing body (1) and the membrane (2) to form a capacitor. A measurement vacuum chamber (26) is provided between the membrane (2) and the second housing body (4). A port (5) communicates with the second housing body (4) to connect the measurement vacuum chamber (26) of the measuring cell to the medium to be measured. The membrane (2) is made from an Al.sub.2O.sub.3 slurry that is sintered in a first heating step, cooled, and then reheated to smooth the membrane.
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