Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece
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United States of America Patent
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Nov 28, 2006
Issued Date -
N/A
app pub date -
Dec 29, 2005
filing date -
Mar 31, 2000
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An apparatus for planarizing a work piece includes an easily assembled work carrier. The carrier includes a carrier insert having a work piece bladder clamped to a carrier backing plate with a plurality of clamps to form a plurality of web plenums. The outer edge of the bladder is supported by a rib that is coupled to a carrier plenum. By adjusting the pressure in the carrier plenum, the pressure exerted on the edge of a work piece during a planarization operation can be adjusted. The carrier also includes a floating wear ring that surrounds the work piece bladder and a work piece mounted on that bladder. By adjusting the force exerted by the wear ring on a polishing pad, independently of the pressure exerted by the rib at the edge of the bladder, the material removal rate near the edge of the work piece can be controlled.
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