System and method for modulating flow through multiple ports in a proximity head

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United States of America Patent

PATENT NO 7143527
SERIAL NO

11273853

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Abstract

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A method of forming a dynamic liquid meniscus includes forming a meniscus at a first size, the meniscus being formed between a proximity head and a first surface and changing the meniscus to a second size by modulating a flow through at least one of a set of ports on the proximity head. A system for modulating flow through the ports in a proximity head is also described.

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Patent Owner(s)

Patent OwnerAddress
LAM RESEARCH CORPORATIONFREMONT CA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
de, Larios John Palo Alto, CA 22 227
Garcia, James P Santa Clara, CA 24 459
Redeker, Fred C Fremont, CA 195 5499

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