Microscopic batteries integrated with MEMS systems
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United States of America Patent
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Dec 5, 2006
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N/A
app pub date -
Dec 10, 2002
filing date -
Mar 10, 1998
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Abstract
Microscopic batteries, integratable or integrated with microelectromechanical systems or other microscopic circuits, including a MEMS microcircuit, and methods of microfabrication of such microscopic batteries are disclosed, among which comprise closed system microscopic batteries for internal storage of electricity using interval reactants only, which comprise microscopic electrodes, electrolyte and reservoir for the electrolyte.
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